Sensirion SFM5500 Mass Flow Meters
Sensirion SFM5500 Mass Flow Meters are high-precision sensors with different calibrations and flow ranges ranging from 10slm down to 50sccm full-scale. Sensirion SFM5500 Mass Flow Meters feature exchangeable push-in fittings and a digital interface. These mass flow meters utilize Sensirion CMOSens® technology, which combines a high-precision sensor element with state-of-the-art signal processing on a single chip.Features
- 10slm max flow rate
- Excellent accuracy and repeatability (0.8%/0.1% of setpoint, respectively)
- <0.1% to 100% full-scale control and measurement range
- G ¼" flange compatible with a broad range of connectors, including Swagelok, Legris, Festo
- Calibrated for multiple gases (air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
- Digital interface with temperature-compensated output
- <100ms settling time
- Up to 10bar pressure resistance
- 169 years mean time between failures (MTBF)
- No drift and no re-calibration required in the field
- NIST-traceable calibration
Applications
- Analytical instrumentation
- Coating/etching equipment
- Medical equipment
- Process automation
- Gas mixing
Additional Resources
Paskelbta: 2022-07-11
| Atnaujinta: 2024-05-08
